Complete Solutions Manual for Nano- and Micro-Electromechanical Systems, 2nd Edition by Sergey Edward Lyshevski ; ISBN13: 9780849328381. (Full Chapters included Chapter 1 to 10)....1.NANOTECHNOLOGY AND MICROTECHNOLOGY (NANO- AND MICRO- SCIENCE, ENGINEERING AND TECHNOLOGY), AND BEYOND 2.NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES 3.NANO- AND MICROSYSTEMS: CLASSIFICATION AND CONSIDERATION 4.FUNDAMENTALS OF MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES 5.DEVISING AND SYNTHESIS OF...